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Aluminum doped SnO2 Thin Films Prepared Via Ultrasonic Spray Pyrolysis: Effect of Annealing Temperature on Its Properties
1Institute of MIcroengineering and Nanoelectronics (IMEN), UNIVERSITI KEBANGSAAN MALAYSIA, Bangi, Selangor, Malaysia
2Research Center for Advanced Materials, National Research and Innovation Agency (BRIN), Tangerang Selatan, Banten, Indonesia
*Email Address : mohd.yusri@ukm.edu.my
Abstract : Aluminum doped SnO2 (Al-SnO2) thin films have been prepared on glass slide via ultrasonic spray pyrolysis (USP) technique. In order to investigate the effect of annealing temperature on the properties of the sample, the annealing temperature has been varied from 350 to 500oC. The samples contain the main cassiterite SnO2 phase. The peak intensity at 38.55o increases with annealing temperature and then decreases at 350 to 500oC. The visible light transmittance does not change significantly with annealing temperature. Photoluminescence (PL) intensity is found to change significantly with annealing temperature with the sample annealed at 350oC possesses the highest PL intensity. The morphology is octahedral grain shape with its size is optimum at the annealing temperature of 450oC. The thickness is found to increase with annealing temperature up to 400oC and then drops. The sample exhibits five fundamental vibrational modes at around 81.10, 691.84, 1047.80, 1193.75 and 2559.76 cm-1, respectively.
Keywords : morphology, optical properties, optical properties, structural properties, ultrasonic spray pyrolysis